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            High purity nitrogen,low working press、cryogenic nitrogen plant

            This set of high purity nitrogen plant which supplies nitrogen as shielding gas for polysilicon industry is provided by Henan Kenuo Energy Plant Co., Ltd. The inertness of high purity nitrogen can protect polysilicon from being oxidized and can serve as material delivering gas. For now this set of plant has operated safely for 3 years in good condition.

            Product Capacity(Nm³/h) Purity Pressure Remarks
            Nitrogen 1000 99.999% 0.8Mpa  
            Liquid Nitrogen 100 99.999% 0.8Mpa  


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